Hamamatsu announces VUV electrostatic remover for semiconductor thin film manufacturing
VUV ionizer L12542
November 29, 2012
Hamamatsu, Japan – November 29, 2012 – Hamamatsu Photonics K.K. has developed the VUV Ionizer,
a deuterium lamp-based electrostatic remover that produces vacuum ultraviolet light to help improve the yield and throughput
of semiconductor thin film manufacturing. The VUV Ionizer is the first of its kind to be developed for electrostatic chucking
and dechucking, which is used in various ways during the production of semiconductor thin films.
Samples of the new VUV Ionizer (part number: L12542) will be available to semiconductor manufacturers from December 10, 2012.
From December 5 to 7, this product will be on display at Semicon Japan 2012, one of the world’s largest trade shows for products,
technology and services related to semiconductor manufacturing.
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