MIPOS 16-158: Z-axis positioner for high performance white light interferometry

MIPOS 16-158

24 January 2013

piezosystem jena presents the new MIPOS 16 - specifically designed for high precision positioning of optical systems with an accuracy in the sub-nanometer range. The high resolution and fast response time of the MIPOS 16 offer new possibilities for interferometry.

Based on its unique design with a 158 mm aperture and a stage height of 42 mm, the MIPOS 16-158 offers technical specifications matching the requirements of white light interferometry. In the field of 3D surface measurement, white light interferometry has become one of the most effective methods. Piezoelectric actuators are able to significantly improve accuracy and speed due to their virtually unlimited resolution and fast response time. The MIPOS 16-158 can achieve a focus range up to 16µm and single step resolution of less than 0.1nm, while operating in a voltage range between – 20 and 130 V.

The MIPOS 16-158 is made for integration into metrology set-ups and devices. The robust drive is equipped with a high resolution piezo based actuating system. The internal mechanical pre-load design enables the MIPOS to operate in high dynamic environments while settling time is reduced down to microseconds.

A further key feature is the high load capability of 3kg (6pounds). Optical setups and components can be moved horizontally and vertically without affecting accuracy and speed. The MIPOS 16-158 can be easily controlled by an analog low voltage signal. Therefore, piezosystem jena provides the nano box USB – an ultra-compact single channel controller with USB 2.0 interface.

Product Highlights:
• Focus Range Up to 16µm
• Single Step Resolution <0.1nm
• Voltage Range -20…130V
• Dimensions: Ø158mm, Stage Height 42mm

For further information on the MIPOS series, please visit PIEZO FOCUS POSITIONER SERIES MIPOS