Newport Introduces Long-Lived Deep UV Excimer Laser Mirrors
Long-Lived Deep UV Excimer Laser Mirrors
January 28, 2013
Irvine, CA – Jan. 28, 2013 – Newport Corporation,
a worldwide leader in laser and photonic solutions that Make, Manage, and Measure Light®,
introduces long-lived deep ultraviolet (UV) excimer laser mirrors with projected lifetimes greater than 30 billion pulses
when used in the proper photocontamination controlled environment. The advanced new mirrors feature all dielectric high reflector
coatings to minimize absorption and maximize reflected energy at 193 nm.
The high energy laser mirrors are designed with Excimer-grade UV fused silica substrates which are polished to better than λ/10
flatness and 10-5 surface quality to preserve wavefront quality and maintain excellent stability.
All coating and testing are done in a special photocontamination controlled deep UV cleanroom that has been qualified to
According to Optics product manager at Newport, Anna Sansan Wang,“Extensive analysis,
research and testing have been done to better understand the conditions at these short wavelengths.
Our coating scientists have investigated various conditions including thermal issues, densification of materials,
and wavelength shift in order to properly optimize the performance of the mirrors at 193 nm under long term use.”
Newport’s new laser mirrors offer exceptionally high laser damage resistance.
Special Pet-G and metal foil packaging ensure that parts are delivered clean and protected from any environmental
photocontamination. The long-lived deep UV Excimer laser mirrors will be featured at SPIE Photonics West in
Newport's booth #1301 at Moscone Center, San Francisco, CA, February 5 - 7, 2013. For more information, please go to:
Newport is represent in Israel by New Technology SK (Newtech):
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