Newport Introduces Higher Accuracy, FMS Linear Stages for Metrology
Newport: FMS Linear Stages for Metrology
September 28, 2012
Irvine, CA – September 28, 2012 – Newport Corporation, a worldwide leader in laser and photonic solutions that
Make, Manage and Measure Light®, introduces the last installment of high accuracy FMS stages for higher-end metrology applications.
Developed specifically to address the needs of surface metrology applications, the FMSxxHA stages are available in 100, 200 and
300 mm models. Similar to the original FMS stages, these HA versions also feature smooth motion, low noise, high straightness and
flatness.
With all-steel construction, the FMS Series combines high stiffness and thermal stability for robust, highly precise, and
repeatable measurements. The crossed roller bearings in the FMS have an anti-creep feature to provide exceptionally smooth
and straight motion, reducing measurement noise and measurement variability. The precision-ground, steel ball screw is designed
for high-speed motion, enabling higher throughput. The FMSxxHA is driven by a stepper motor, with a linear encoder that provides
exceptional on-axis accuracy down to 1µm and sub-micron bi-directional repeatability.
For added flexibility in gathering metrology data, the FMS Series is compatible with Newport's high-performance 8-axis XPS
Universal Controller, an ESP-compatible, integrated controller/driver. Newport's new FMSxxHA product is ideal for surface
metrology, surface profilometry and tribology applications. For more information about the new HA version, please visit:
www.newport.com/FMS.
Newport is represent in Israel by New Technology SK (Newtech):
http://www.newtech.co.il
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