Fully Integrated Benchtop Ellipsometer Combines Automation,
Ease and High Performance for Thin Film Applications
February 7, 2013
HORIBA Scientific (HORIBA), a global leader with over 20 years of experience in phase modulation ellipsometry technology, is
pleased to announce the launch of the UVISEL 2, a new generation of scientific spectroscopic ellipsometers. The UVISEL 2 pioneers
the combination of a fully automated platform that includes a patented vision system, 8 computer selectable, achromatic spot sizes,
and fast scanning, high-resolution monochromators, making it a unique solution for efficient and rapid thin film characterization
over a broad spectral range of 190-2100nm. No other instrument on the market offers this combination of capabilities.
The UVISEL 2 is designed as a highly automated instrument to provide automatic goniometer, automatic XYZ stage, automatic sample
adjustment and automatic microspot optics. Microspots, combined with a real-time vision system, allow straightforward and accurate
spot positioning on a sample. A selection of eight achromatic spots (down to 35µm) allows the user to perform measurements on a
broad spectral range even with a small spot size. This unique system always allows an image to be obtained, whether on rough,
smooth, transparent or reflective surfaces.
UVISEL 2 is the most sensitive and accurate spectroscopic ellipsometer on the market. With its robust phase modulation control
and the new electronics, it is capable of characterizing advanced optical and material properties (e.g., anisotropy, gradient),
detecting very thin layers (e.g., graphene) and can follow ultra fast kinetic phenomena at up to 1ms per point.
The detection systems in VIS-FUV and NIR have also been enhanced to provide very low stray light and faster acquisition.
The powerful DeltaPsi2 software controls the UVISEL 2 to offer the largest range of data acquisition and advanced modelling
features. New automatic troubleshooting facilitates the diagnosis of problems. And its new automatic calibration procedure
using integrated reference samples ensures easy calibration. The user interface is intuitive and customized to meet the
requirements of both experienced scientists and newcomers.
“The UVISEL 2 combines unique features in terms of automation, performance, ease-of-use and advanced software,
providing unique optimal working conditions for accurate thin film thickness measurement and optical analysis,”
stated Professor Stergios Logothetidis, Aristotle University of Thessaloniki, Greece. “In fact, by combining these features
into one ellipsometer, HORIBA has ensured that the UVISEL 2 is ideal for both research and
industrial quality control of thin films.”
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